Mark J. Jackson, Microfabrication and Nanomanufacturing
Mark J. Jackson, Microfabrication and Nanomanufacturing
ISBN: 0824724313 | edition 2005 | PDF | 388 pages | 25 mb
ISBN: 0824724313 | edition 2005 | PDF | 388 pages | 25 mb
The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing.