Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers
Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers
Springer | Materials | February 8, 2016 | ISBN-10: 3658113871 | 112 pages | pdf | 4.7 mb
Springer | Materials | February 8, 2016 | ISBN-10: 3658113871 | 112 pages | pdf | 4.7 mb
Authors: Reichel, Denise
Publication in the field of natural sciences
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.
Number of Illustrations and Tables
77 in colour
Topics
Solid State Physics
Thermodynamics
Materials Engineering
More info and Hardcover at Springer
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