Measurement Technology for Micro-Nanometer Devices
Measurement Technology for Micro-Nanometer Devices
Wiley | Microelectronic Devices | Dec 12, 2016 | ISBN-10: 1118717961 | 352 pages | pdf | 21.04 mb
Wiley | Microelectronic Devices | Dec 12, 2016 | ISBN-10: 1118717961 | 352 pages | pdf | 21.04 mb
by Wendong Zhang (Author), Xiujian Chou (Author), Tiekin Shi (Author), Zongmin Ma (Author), Haifei Bao (Author), Jingdong Chen (Author), Liguo Chen (Author), Dachao Li (Author), Chenyang Xue (Author)
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
• Companion website includes Lab View soft, micro-vision system test software, and algorithm software, enhancing the learning experience
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