Optical Imaging in Projection Microlithography by Alfred Kwok-Kit Wong
English | Mar. 9, 2005 | ISBN: 047103570X | 242 Pages | PDF | 9 MB
English | Mar. 9, 2005 | ISBN: 047103570X | 242 Pages | PDF | 9 MB
Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system level view of the parameter tolerances required in manufacturing.