Handbook of Surface and Nanometrology by David J. Whitehouse
English | 1 Dec. 2002 | ISBN: 0750305835 | 1128 Pages | PDF | 47 MB
English | 1 Dec. 2002 | ISBN: 0750305835 | 1128 Pages | PDF | 47 MB
The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained with numerous practical examples.