Shape and Functional Elements of the Bulk Silicon Microtechnique
Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures by Joachim Frühauf
English | 12 Oct. 2004 | ISBN: 3540221093 | 228 Pages | PDF | 9 MB
English | 12 Oct. 2004 | ISBN: 3540221093 | 228 Pages | PDF | 9 MB
The idea for this manual was created by the author and Birgit Hannemann (now Professor at the University of Applied Sciences, Bremen, Germany) as an internal catalogue of results of several years of investigations at the Chemnitz University of Technology, Germany.