Acoustic Wave and Electromechanical Resonators: Concept to Key Applications

This groundbreaking book provides a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, professionals find extensive coverage of these devices at both the technology and application levels. This practical reference offers guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping practitioners to choose the right approaches for their projects. RF and microwave, telecommunications, material and process, and MEMS/NEMS engineers and scientists. Humberto Campanella is an associate professor at the Universitat Autonoma de Barcelona (UAB) and serves on the graduate research staff at the Centro Nacional de Microelectronica in Barcelona. He holds a Ph.D. in both electronics engineering and microelectronics and automated systems from Universitat Autonoma de Barcelona and the Universite Montpellier II in France, respectively.