Microelectronic Test Structures for CMOS Technology (repost)
Manjul Bhushan, "Microelectronic Test Structures for CMOS Technology"
Publisher: S–-ger | ISBN 10: 1441993762 | 2011 | PDF | 408 pages | 12.7 MB
Publisher: S–-ger | ISBN 10: 1441993762 | 2011 | PDF | 408 pages | 12.7 MB
Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has become ever more important with the increased cost and complexity of development and manufacturing.