Lithography Process Control (Repost)
Harry J. Levinson, "Lithography Process Control"
1999 | pages: 198 | ISBN: 0819430528 | PDF | 12,7 mb
1999 | pages: 198 | ISBN: 0819430528 | PDF | 12,7 mb
Covers lithography process control at several levels, from fundamental through advanced topics. Self-contained tutorial works both as an introduction to the technology and as a reference for the experienced lithographer. Reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback.
Contents
- Preface
- Introduction to the use of statistical process control in lithography
- Sampling
- Simple and complex processes
- Linewidth control
- Overlay
- Yield
- Process drift and automatic process control
- Metrology
- Control of operations
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